High-Speed Laser Vibrometry of Aluminum Nitride Resonator
In a ground-breaking study that promises to redefine precision measurement in microelectromechanical systems (MEMS), Liu, Z., Niu, X., Vatankhah, E., ...
In a ground-breaking study that promises to redefine precision measurement in microelectromechanical systems (MEMS), Liu, Z., Niu, X., Vatankhah, E., ...
© 2025 Scienmag - Science Magazine
© 2025 Scienmag - Science Magazine