In late September 2025, KIOXIA Iwate Corporation, headed by CEO Koichiro Shibayama, is set to embark on a groundbreaking evaluation of a GaN-based electron beam technology that has emerged from a collaboration between Photo electron Soul Inc. (PeS), a startup spun out of Nagoya University, and the Amano–Honda Laboratory at Nagoya University. This marks a significant step forward in semiconductor inspection and metrology, focused on leveraging the unique properties of gallium nitride (GaN) to enhance the precision and effectiveness of semiconductor manufacturing processes.
Photoelectron Soul Inc. has pioneered a next-generation electron gun specifically designed for GaN photocathodes, achieving remarkable results in semiconductor inspection and metrology. This new technology enables electron microscopy capable of analyzing nanoscale transistors and intricate high-aspect-ratio structures, which are critical in modern semiconductor applications. By implementing GaN photocathodes, PeS has successfully opened up new avenues for inspecting and measuring electrical properties in semiconductor manufacturing, which were previously difficult or even impossible to achieve with existing conventional technologies.
The introduction of this technology offers immense potential to enhance non-contact electrical inspection and metrology during the early phases of semiconductor manufacturing. This innovation is set to revolutionize how defects and structures within high-aspect-ratio features are assessed, effectively improving overall manufacturing yield. KIOXIA Iwate’s upcoming trials in production lines will focus on verifying how this advanced technology can directly impact defect detection rates and yield improvement, while also facilitating deeper root cause analysis within the manufacturing process.
Historically, the value of electron beam technology from semiconductor photocathodes has been acknowledged for over 25 years; however, practical applications have faced substantial hurdles due to issues related to fragility. Researchers at Nagoya University have successfully addressed these challenges by developing GaN photocathodes that boast more than a twenty-fold increase in durability when compared to traditional technologies. This breakthrough marks a significant milestone in e-beam innovation that has been sought for nearly five decades.
The advancements made by Photo electron Soul extend beyond durability; they have also developed an electron gun tailored for GaN photocathodes. These specialized electron guns have demonstrated impressive operational lifetimes and consistent uptime stability within semiconductor manufacturing environments. This development has fortified the industrial applicability of GaN photocathodes, which are now positioned as a robust alternative to legacy technologies. Additionally, PeS has pioneered a technique called Digital Selective e-Beaming (DSeB), which synchronizes the electron beam scanning process in scanning electron microscopy (SEM) with the laser that energizes the photocathode, enabling controlled intensity delivery of electron beams to specific pixel locations on SEM images.
The significance of this innovative approach to semiconductor inspection and metrology becomes even more pronounced when considering the increasing complexities of modern semiconductor devices, characterized by miniaturization and three-dimensional integration. While the methodologies for producing smaller devices are well-established, inspection and metrology technologies have started to reach critical limitations, with no clear solutions at hand for resolving ongoing yield challenges. Photo electron Soul has made significant headway by demonstrating that their new inspection and metrology approach can effectively address two major challenges faced in semiconductor manufacturing.
Firstly, the challenge of directly electrically inspecting nanoscale transistors within densely integrated semiconductor chips has been a significant hurdle. Traditional methods of contact probing have proven ineffective in these scenarios. Utilizing Digital Selective e-Beaming, PeS has successfully been able to selectively irradiate specific regions of nanoscale transistors in memory devices, leveraging electron-beam–induced charging to generate gate bias, enabling non-contact switching, which can be observed and analyzed through SEM imaging.
Secondly, the inspection and metrology of three-dimensional semiconductor devices characterized by high aspect ratios has posed a considerable challenge for manufacturers. In advanced device architectures such as 2.5D and 3D chiplets, high-aspect-ratio trench structures with submicron openings are prevalent, complicating the ability to inspect sidewalls and detect underlying structures and defects. By employing Digital Selective e-Beaming, PeS has effectively enabled targeting of trench bottoms for in-depth observations, allowing for the detection of residues and a comprehensive visualization of structural integrity.
These advancements herald a new era for semiconductor manufacturing, particularly in overcoming the long-standing yield challenges that have plagued the industry. The capability to provide non-contact electrical inspection and metrology during front-end manufacturing stages allows for greater accuracy and efficiency than ever achieved previously. The expected outcomes from the KIOXIA Iwate evaluations stand to significantly influence the semiconductor landscape, introducing methodologies that promise to elevate defect detection rates and improve overall production yields.
As KIOXIA Iwate continues its evaluation of this robust technology in real production scenarios, there is significant optimism surrounding its potential integration as a core component of future semiconductor manufacturing. Detailed assessments within actual workflows will aid in clarifying how this innovative GaN-based electron beam technology can influence yield improvement through enhanced defect detection and valuable root cause analysis.
Furthermore, this initiative exemplifies a successful model for the implementation of university-developed technologies into commercial applications. The collaboration between Photo electron Soul, a university startup, and KIOXIA demonstrates the potential for breakthrough innovations to emerge when academia and industry work together towards a common goal. The synergy between these two entities not only fosters innovation but also brings about tangible advancements in semiconductor manufacturing technology, demonstrating the relevance and necessity of such partnerships.
Moving forward, the implications of this technology extend beyond the laboratory and production line. As semiconductor devices continue to evolve and grow in complexity, the importance of effective inspection and metrology systems cannot be overstated. The ability to conduct efficient, non-contact inspections that yield valuable insights during manufacturing processes positions GaN photocathodes as a essential tool for the future of semiconductor fabrication. This collaboration could very well pave the way for the next generation of semiconductor technologies, ultimately pushing the boundaries of what is possible in the realm of electronics and beyond.
In conclusion, the development and implementation of GaN-based electron beam technology stands as a pivotal moment in semiconductor manufacturing, enabling manufacturers to overcome longstanding challenges while keeping pace with the ever-growing demands for smaller, more efficient devices. The partnership between academia and industry exemplifies the power of collaborative innovation in crafting solutions that will define the future landscape of semiconductor technology.
Subject of Research: GaN-based electron beam technology for semiconductor manufacturing.
Article Title: KIOXIA Iwate Evaluates Groundbreaking GaN-Based Electron Beam Technology for Semiconductor Inspection and Metrology.
News Publication Date: October 2023.
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Image Credits: Photo electron Soul Inc.
Keywords
GaN, electron beam, semiconductor manufacturing, inspection, metrology, KIOXIA, Photo electron Soul, Nagoya University, Digital Selective e-Beaming, technology innovation.
